CVD Diamond Substrates

Polycrystalline CVD diamond has long been recognized as the ultimate material in a wide variety of applications due to its extreme qualities. Its unmatched hardness is needed for sophisticated tooling and machining processes worldwide. The high thermal conductivity of diamond has made it useful in thermal-management applications. Its wide optical transmission range has allowed diamond windows to make their way into cutting-edge, future-generation lithography systems for semiconductor manufacturing. In addition, its transparency in the microwave band has opened up an entire world of application development in microwave engineering. In its purest form, polycrystalline CVD diamond is free of electronic traps, making it an ideal material for ultrasensitive nuclear detectors used in high-energy applications.

Grown through plasma chemical vapor deposition, Coherent’s diamond products have been optimized to leverage the qualities that make diamond a super-material. Combining crystal growth with state-of-the-art optical-grade processing through shaping and polishing, quality assurance, and coatings makes Coherent the world’s leader in optical-grade materials. Coherent is also a leader in generating highly transparent microwave windows and the highest-sensitivity diamond-based nuclear detectors. Coherent’s strong dedication to research and development, including more than 50 combined years in diamond materials development, allows us to work closely with customers in all markets looking to leverage the qualities of polycrystalline CVD diamond.

Transparent Windows and Optics
Optical diamond is in large-volume production, consistently producing material of premium optical quality (low 1 μm scatter, low 10.6 μm bulk absorption, low birefringence at 632.8 nm) in a wide range of cross-sectional sizes and thicknesses.
By leveraging core technologies both in fabrication and coating, Coherent has become the world leader in extreme-UV optical diamond windows. These windows are essential for the next generation of advanced lithography tools for semiconductor manufacturing.

Thermal-Management Solutions
By tuning our growth process, Coherent has the capability of generating polycrystalline CVD diamond for a variety of high-performance temperature-management applications. Specifications for thermal conductivity range up to more than 2200 W/m-K. Using our world-class fabrication facility, we are able to create parts based on customer specifications with shapes as large as 145 mm in diameter, and thicknesses of up to 2 mm and more that are ultraflat and ultrasmooth to ensure optimum thermal contact to your device.

Microwave-Transparent Optics
Coherent manufactures high-quality diamond optical products that are transparent in the microwave region. Combining this with our in-house capability to polish and coat windows and lenses at diameters as large as 145 mm, Coherent is poised to meet the needs of microwave-transparent materials in fields such as fusion research.

 Machining Solutions
Coherent has developed a diamond film that possesses exemplary hardness and wear rates when machining even the toughest materials. By combining our state-of-the-art polishing and fabrication techniques with in-house laser fabrication facilities, we are able to generate a world-class product at competitive prices.

 Nuclear Detector Solutions
Using a finely tuned, ultrahigh-purity growth process, Coherent grows polycrystalline diamond films exhibiting industry-leading charge-collection distances. Consistent results are obtained for 500 µm thick finished parts.

 Major CVD Diamond Applications
CVD diamond applications include multispectral laser optics, dielectric windows, heat sinks, and more. 

Diamond is the ultimate material for a wide variety of applications because of its outstanding properties, including extreme hardness and strength, high thermal conductivity, low thermal expansion, excellent dielectric properties, resistance to chemical attack, and optical transmission over a wide spectral range.

We produce high-quality polycrystalline CVD diamond substrates in our state-of-the-art growth and fabrication facilities. The material is grown using a plasma-assisted chemical vapor deposition process, laser-cut to the required dimensions, and the surface is finished to the customer’s specification. Other special fabrication services are available, such as edge-grinding, laser-engraving, and optical assembly design and fabrication. Coherent specializes in advanced optical coatings for diamond substrates, including AR, HR, and TFP for single-wavelength or multispectral applications.

Some of the products that can be supplied by Coherent include:

  • High-power CO2 laser windows (10µm range) for industrial laser applications
  • High-power multi-spectral laser windows for industrial or research applications.
  • High-power millimeter-wave windows for fusion and directed energy applications
  • Heat spreaders for extreme thermal management applications
  • Products for mechanical applications requiring ultra-hard materials.

 

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