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CVD Diamond Substrates

Polycrystalline CVD diamond has been long recognized as the ultimate material in a wide variety of applications due to its extreme qualities. Its unmatched hardness is needed for sophisticated tooling and machining processes worldwide. The high thermal conductivity of diamond has made it useful in thermal management applications. Its wide optical transmission range has allowed diamond windows to make their way into cutting edge future generation lithography systems for semiconductor manufacturing. In addition, its transparency in the microwave band has opened up an entire world of application development in microwave engineering. In its purest form, polycrystalline CVD diamond is free of electronic traps, making it an ideal material for ultra-sensitive nuclear detectors used in high energy applications.

Grown through Plasma Chemical Vapor Deposition, II-VI diamond products have been optimized to leverage the qualities that make diamond a super material. Combining crystal growth with state of the art optical grade processing through shaping and polishing, quality assurance and coatings, II-VI Incorporated is the world’s leader in optical grade materials, as well as generating highly transparent microwave windows and the highest sensitivity diamond-based nuclear detectors. II-VI Incorporated’s strong dedication to research and development, including more than 50 combined years in diamond materials development, allows us to work closely with customers in all markets looking to leverage the amazing qualities of polycrystalline CVD diamond.

Transparent Windows and Optics

Optical diamond is in large volume production, consistently producing material of premium optical quality (low 1μm scatter, low 10.6μm bulk absorption, low birefringence at 632.8nm) in a wide range of cross-sectional sizes and thicknesses.
By leveraging core technologies both in fabrication and coating, II-VI has become the world leader in extreme UV optical diamond windows, which are essential for the next generation of advanced lithography tools for semiconductor manufacturing.

Thermal Management Solutions

Through tuning of our growth process, II-VI has the capability of generating polycrystalline CVD diamond for a variety of high performance temperature management applications. Specifications for thermal conductivity range up to more than 2200 W/m-K. Using our world class fabrication facility, we are able to create parts based on customer specifications with shapes as large as 145mm in diameter and thicknesses of up to 2mm and more that are ultra-flat and ultra-smooth to ensure optimum thermal contact to your device.

Microwave Transparent Optics

II-VI manufactures high quality diamond optical products that are transparent in the microwave region. Combining this with in-house capability to polish and coat windows and lenses at diameters as large as 145mm, II-VI is poised to meet the needs of microwave transparent materials in fields such as fusion research.

Machining Solutions|

II-VI has developed a diamond film that possesses exemplary hardness and wear rates when machining even the toughest materials. By combining our state of the art polishing and fabrication techniques with in-house laser fabrication facilities, we are able to generate a world-class product at competitive prices.

Nuclear Detector Solutions

Using a finely tuned, ultra-high purity growth process, II-VI grows polycrystalline diamond films exhibiting industry leading charge collection distances. Consistent results are obtained for 500µm thick finished parts.

Major CVD Diamonds Applications

CVD diamond applications include multispectral laser optics, dielectric windows, heat sinks, and more. 

Diamond is the ultimate material for a wide variety of applications because of its outstanding properties, including extreme hardness and strength, high thermal conductivity, low thermal expansion, excellent dielectric properties, resistance to chemical attack, and optical transmission over a wide spectral range.

We produces high-quality polycrystalline CVD diamond substrates in its state-of-the-art growth and fabrication facilities. The material is grown using a plasma-assisted chemical vapor deposition process, laser-cut to the required dimensions, and the surface is finished to the customer’s specification. Other special fabrication services are available, such as edge-grinding, laser-engraving, and optical assembly design and fabrication. II-VI specializes in advanced optical coatings for diamond substrates, including AR, HR, and TFP for single wavelength or multi-spectral applications.

Some of the products that can be supplied by II-VI include:

  • High-power CO2 laser windows (10µm range) for industrial laser applications
  • High-power multi-spectral laser windows for industrial or research applications.
  • High-power millimeter-wave windows for fusion and directed energy applications
  • Heat spreaders for extreme thermal management applications
  • Products for mechanical applications requiring ultra-hard materials.

Major CVD Diamonds Applications

  • CO2 Laser Windows(10.6µm)
    - High Power Industrial Leasers
  • High Power Microwave Windows
    - Gyrotrons, Fusion Reactors
    - Radar, Directed Energy Weapons
  • Thermal Management
    - Heat Sinks
Reaction Bonded Silicon Carbide

II-VI, the high power CO2 and Fiber laser solution center is once again bringing you the next generation of high power laser optical materials. In collaboration with our wholly owned subsidiary M Cubed Technologies, II-VI is working to develop materials tailored for the future of high power laser processing. Engineered materials such as Reaction Bonded SiC (RB SiC) and Reaction Bonded SiC + Diamond (RB SiC + Diamond) combine all of the best material properties of traditional mirror materials into one optimized material solution.

Advantages of RB SiC over traditional high power mirror materials:

  • Coefficient of thermal expansion 5x lower than copper reduces the deformation of the optical surface due to the thermal load.
  • Density 3x lower than copper reduces the weight of the mirror and allows for use in cutting heads that require fast movement of the head.
  • Ability to add internal water cooling channels gives it an advantage over Si mirrors.
  • Ability to directly polish with roughness < 40Å and coated with any II-VI high reflector coating.

Reaction Bonded SiC + Diamond

If even greater thermal load handling capability is required RB SiC + Diamond could be the answer. With a CTE similar to CVD Diamond and a Thermal Conductivity greater than any traditional metal substrate SiC + Diamond is the ideal material for high thermal loads.

Advantages of RB SiC + Diamond :

  • Potential to achieve a coefficient of thermal expansion nearly 14x superior to copper with a thermal conductivity that is 1.6x higher.
  • Ability to create internal water cooling structures similar to RB SiC
  • Ability to directly polish with roughness < 40Å and coated with any II-VI high reflector coating.

Materials Stability Chart

Materials Properties

Material properties of RB SiC vs. standard mirror materials

Material Density (g/cc)

Young’s Modulus (GPa)

Thermal Cond. (W/mK)

CTE
(ppm/K at RT)

RB SiC

2.95

344

151

2.9

Copper

8.96

117

390

16.7

Silicon

2.33

131

156

2.6

Aluminum

2.7

69

167

22.5

Material properties of RB SiC vs. standard mirror materials 

Material properties of Reaction Bonded SiC + Diamond

Formulation Density (g/cc)

Young’s Modulus (GPa)

Thermal Cond. (W/mK)

CTE
(ppm/K at RT)

RB SiC

2.95

344

151

2.9

RB SiC + Diamond -1.8

3.17

485

280

1.8

RB SiC + Diamond -1.5

3.23

545

430

1.5

RB SiC + Diamond -1.2

3.33

700

620

1.2

Material properties of Reaction Bonded SiC + Diamond

Thermal Grade Polycrystalline CVD Diamond

II-VI has developed processes to deliver wafers of polycrystalline CVD diamond at diameters of up to 145mm with exceptional thermal properties. With the ability to target a range of thermal conductivities from 1,500 W/mK to more than 2,200 W/mK, II-VI Advanced Materials can meet the needs in the most demanding thermal applications.

II-VI has been running production-level diamond growth processes for a world-wide customer base since 2010. We have established high repeatability and reliability in producing diamond materials at even the toughest specifications. We are prepared to handle high volume production requirements for thermal management applications.

Coupling our thermal management growth process with a world-class optical fabrication facility, II-VI can deliver laser machined, optically polished thermal materials to meet strict bow, warp, and surface roughness specifications to ensure optimal thermal contact to your high powered device. In addition to growth and fabrication, our staff are ready to work with customers through the use of internal metrology such as lamp flash thermal diffusivity measurements and SEM as well as thermal models to engineer application specific solutions.

II-VI Diamond Thermal Management solutions

  • Thermal conductivity tailored to suit both performance and cost requirements
  • Custom sizes and shapes for your specific solution
  • Optical transparency when needed
  • Means to quantify bonding efficacy and stack performance

Our flagship T-2200 Diamond Thermal Management Material couples extraordinary thermal conductivity of better than 2,200 W/mK with high transparency in a wide range of wavelengths (e.g. 1um, 10.6um, IR, Microwave) making it ideal for high power optoelectronic applications. In addition state of the art, high performance optical coatings can be applied to further improve diamond’s already superb optical properties.

The T-1500 Diamond Thermal Management Material, with thermal conductivity of better than 1,500 W/mK is an outstanding thermal management solution for a wide array of applications. This high performance material may be used in more price sensitive applications with the same optical finishes from our world-class optical fabrication facility.

 

Material Properties
Structure cubic, polycrystalline
Grain Size Thickness and process dependent (0.05 - 1mm)
Grades T-1500, T-2200
Thickness* up to 2mm
Fabrication Capability*
Size Laser-cut to customer specification, maximum diameter 145mm
Dimensional Tolerance +/- 50µm
Polishing Aspect Ratio Up to 50:1 for diameters up to 145mm
Bow 4µm/cm
Warp 4µm/cm
Local Thickness Variation 1µm/cm are achievable
Surface Roughness <15nm
Thermal Properties T-1500 T-2200
Thermal Conductivity >1,500 (W/mK) >2,200 (W/mK)
Thermal Diffusivity >800(mm-2/sec) >1150(mm-2/sec)
Thermal Expansion Coefficent 1 (10-6 K-1) 1 (10-6 K-1)
Specific Heat (25ºC) 0.536 (J g-1 K-1) 0.536 (J g-1 K-1)
CVD Diamond Substrates
Polycrystalline CVD diamond has been long recognized as the ultimate material in a wide variety of applications due to its extreme qualities. Its unmatched hardness is needed for sophisticated tooling and machining processes world... Read More
Reaction Bonded Silicon Carbide
II-VI, the high power CO2 and Fiber laser solution center is once again bringing you the next generation of high power laser optical materials. In collaboration with our wholly owned subsidiary M Cubed Technologies, II-VI is working to develop mat... Read More
Thermal Grade Polycrystalline CVD Diamond
II-VI has developed processes to deliver wafers of polycrystalline CVD diamond at diameters of up to 145mm with exceptional thermal properties. With the ability to target a range of thermal conductivities from 1,500 W/mK to more t... Read More
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